GIMS engineering design of mechanical manufacturing based on intranet environment

基于Intranet环境的机械制造业CIMS工程设计

KEYWORDS : GIMS , ion source , anode layer , sputtering , TiN , ion plating , medium frequency , pulsed DC .

中文关键词：气离溅射、离子源、阳极层流、溅射、氮化钛、离子镀膜、中频、脉冲直流。

ABSTRACT : In this paper a reactive ion plating method and system configuration of Gas Ion source enhanced Magnetron Sputtering ( GIMS ) is presented in details .

摘要：本文详细介绍了气体离子源增强磁控溅射（气离溅射）反应离子镀膜技术和系统配置。

The status of Green Integrated Manufacturing System and CAPP are analyzed as well as their relationship . Based on the analysis , a plan concerning with the improvement of CAPP is brought forward to meet the requirement of GIMS .

本文对绿色集成制造系统及CAPP系统的现状进行了分析，阐明了绿色集成制造系统对CAPP系统的要求，及如何对CAPP系统进行改进。

KEYWORDS : GIMS , ion source , anode layer , sputtering , TiN , ion plating , medium frequency , pulsed DC . Influences of solar flare bursts and partical precipitation on the lower ionosphere have been observed by means of VLF propagation effects at Zhongshan Station in Antarctica .

中文关键词：气离溅射、子源、极层流、射、化钛、子镀膜、频、冲直流。在南极中山站利用甚低频传播手段观测太阳耀斑爆发及极区粒子沉降对低电离层的影响。